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详细信息
快速的响应时间
金属密封.
压电控制阀.
316L不锈钢材质.
5 ccm-100 slm流量
技术规格:
ModelSEC-4400 SEC-4500 SEC-4550 SEC-4600 StandardFlow Range(N2 Eq.) 5 sccm ~ 8 slm 10 ~ 30 slm 31 ~ 50 slm 51 ~ 100 slm Wetted Materials M (metal) -Type: SUS-316L-R (viton) type Valve Piezo Valve (Normal Close or Normal Open) FlowControl Range 2 ~ 100% F.S. Accuracy ± 1% F.S. Response <1.0sec. (500ms typical) Linearity ± 0.5% F.S. Repeatability ± 0.2% F.S. Operating Pressure 14 ~ 42 psi 21 ~ 42 psi Leak Integrity M-Type: 5x10 -10 Pa·m ³/s(He) or less Operating Temperature 5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) Flow Rate Setting Signal 0.1 ~ 5VDC Flow Rate Output Signal 0 ~ 5VDC Power Supply ± 15VDC ± 5% 60mA Standard Fitting 1/4” VCR, 1/4” Swagelok 3/8”VCR,3/8”Swagelok